Inventor

LAI SHOULIANG

US9 patents

⚠️ This page may combine multiple inventors who share the name “LAI SHOULIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNAXIS USA INC

4 patents

US6924235B2Aug 2, 2005

Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method

UNAXIS USA INC33 citations92

US6905626B2Jun 14, 2005

Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasma

UNAXIS USA INC11 citations73

US7115520B2Oct 3, 2006

Method and apparatus for process control in time division multiplexed (TDM) etch process

UNAXIS USA INC5 citations62

US7381650B2Jun 3, 2008

Method and apparatus for process control in time division multiplexed (TDM) etch processes

UNAXIS USA INC5 citations58

CTS CORP

2 patents

US6259185B1Jul 10, 2001

Metallization for high power handling in a surface acoustic wave device and method for providing same

CTS CORP28 citations91

US6809612B2Oct 26, 2004

Dielectric block signal filters with cost-effective conductive coatings

CTS CORP16 citations79

LAI SHOULIANG

2 patents

US7959819B2Jun 14, 2011

Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes

LAI SHOULIANG4 citations60

US7829465B2Nov 9, 2010

Method for plasma etching of positively sloped structures

LAI SHOULIANG3 citations57

MOTOROLA INC

1 patent

US6452305B1Sep 17, 2002

High power surface acoustic wave device

MOTOROLA INC5 citations59