Inventor
WELDON DAVID E
US23 patents
⚠️ This page may combine multiple inventors who share the name “WELDON DAVID E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ONTRAK SYSTEMS INC
6 patentsUS5803799ASep 8, 1998
Wafer polishing head
ONTRAK SYSTEMS INC154 citations99
US5593344AJan 14, 1997
Wafer polishing machine with fluid bearings and drive systems
ONTRAK SYSTEMS INC154 citations98
US5575707ANov 19, 1996
Polishing pad cluster for polishing a semiconductor wafer
ONTRAK SYSTEMS INC134 citations98
US5558568ASep 24, 1996
Wafer polishing machine with fluid bearings
ONTRAK SYSTEMS INC204 citations98
US5800248ASep 1, 1998
Control of chemical-mechanical polishing rate across a substrate surface
ONTRAK SYSTEMS INC133 citations96
US5571044ANov 5, 1996
Wafer holder for semiconductor wafer polishing machine
ONTRAK SYSTEMS INC27 citations92
APLEX INC
5 patentsUS6000997ADec 14, 1999
Temperature regulation in a CMP process
APLEX INC101 citations95
US6086456AJul 11, 2000
Polishing method using a hydrostatic fluid bearing support having fluctuating fluid flow
APLEX INC19 citations91
US6126527AOct 3, 2000
Seal for polishing belt center support having a single movable sealed cavity
APLEX INC26 citations90
US6042457AMar 28, 2000
Conditioner assembly for a chemical mechanical polishing apparatus
APLEX INC28 citations89
US6159083ADec 12, 2000
Polishing head for a chemical mechanical polishing apparatus
APLEX INC14 citations71
MOSEL VITELIC INC
5 patentsUS6267655B1Jul 31, 2001
Retaining ring for wafer polishing
MOSEL VITELIC INC53 citations94
US6315857B1Nov 13, 2001
Polishing pad shaping and patterning
MOSEL VITELIC INC42 citations89
US6875085B2Apr 5, 2005
Polishing system including a hydrostatic fluid bearing support
MOSEL VITELIC INC6 citations61
US6244945B1Jun 12, 2001
Polishing system including a hydrostatic fluid bearing support
MOSEL VITELIC INC3 citations61
US6322429B1Nov 27, 2001
Conditioner assembly and a conditioner back support for a chemical mechanical polishing apparatus
MOSEL VITELIC INC2 citations60