Inventor
KAO SHU-HSIN
US10 patents
⚠️ This page may combine multiple inventors who share the name “KAO SHU-HSIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APLEX INC
3 patentsUS6000997ADec 14, 1999
Temperature regulation in a CMP process
APLEX INC101 citations95
US6086456AJul 11, 2000
Polishing method using a hydrostatic fluid bearing support having fluctuating fluid flow
APLEX INC19 citations91
US6126527AOct 3, 2000
Seal for polishing belt center support having a single movable sealed cavity
APLEX INC26 citations90
MOSEL VITELIC INC
3 patentsUS6267655B1Jul 31, 2001
Retaining ring for wafer polishing
MOSEL VITELIC INC53 citations94
US6875085B2Apr 5, 2005
Polishing system including a hydrostatic fluid bearing support
MOSEL VITELIC INC6 citations61
US6244945B1Jun 12, 2001
Polishing system including a hydrostatic fluid bearing support
MOSEL VITELIC INC3 citations61