P

Inventor

CAN LINH X

US7 patents
⚠️ This page may combine multiple inventors who share the name “CAN LINH X”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MOSEL VITELIC INC

3 patents
US6267655B1Jul 31, 2001

Retaining ring for wafer polishing

MOSEL VITELIC INC53 citations94
US6315857B1Nov 13, 2001

Polishing pad shaping and patterning

MOSEL VITELIC INC42 citations89
US6322429B1Nov 27, 2001

Conditioner assembly and a conditioner back support for a chemical mechanical polishing apparatus

MOSEL VITELIC INC2 citations60

APLEX INC

3 patents
US6042457AMar 28, 2000

Conditioner assembly for a chemical mechanical polishing apparatus

APLEX INC28 citations89
US5957764ASep 28, 1999

Modular wafer polishing apparatus and method

APLEX INC25 citations89
US6062961AMay 16, 2000

Wafer polishing head drive

APLEX INC2 citations54

NOVELLUS SYSTEMS INC

1 patent
US6860710B1Mar 1, 2005

Lifting mechanism for integrated circuit fabrication systems

NOVELLUS SYSTEMS INC7 citations71