Inventor
HU TAIN-CHEN
TW3 patents
Patents
3 patentsUS6553335B2Apr 22, 2003
Method and apparatus for determining end-point in a chamber cleaning process
TAIWAN SEMICONDUCTOR MFG19 citations79
US6688344B2Feb 10, 2004
Container flush and gas charge system and method
TAIWAN SEMICONDUCTOR MFG4 citations57
US5896852AApr 27, 1999
Chemical reactant bottle and method of use thereof
TAIWAN SEMICONDUCTOR MFG2 citations51