Inventor
NAKAUCHI AKIHIRO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “NAKAUCHI AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
11 patentsUS7081962B2Jul 25, 2006
Aberration measuring apparatus for an optical system utilizing soft x-rays
CANON KK15 citations82
US6977728B2Dec 20, 2005
Projection exposure apparatus and aberration measurement method
CANON KK12 citations82
US6859264B2Feb 22, 2005
Projection exposure apparatus having aberration measurement device
CANON KK10 citations73
US6721056B1Apr 13, 2004
Surface shape measuring apparatus and method
CANON KK9 citations73
US6650398B2Nov 18, 2003
Wavefront aberration measurement method and projection exposure apparatus
CANON KK4 citations62
US8345263B2Jan 1, 2013
Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern
CANON KK3 citations61
US8004691B2Aug 23, 2011
Measuring apparatus, exposure apparatus and method, and device manufacturing method
CANON KK3 citations61
US7619748B2Nov 17, 2009
Exposure apparatus mounted with measuring apparatus
CANON KK3 citations61
US7602473B2Oct 13, 2009
Exposure apparatus and device manufacturing method using the same
CANON KK3 citations61
US7403291B2Jul 22, 2008
Method of calculating two-dimensional wavefront aberration
CANON KK6 citations61
US8823950B2Sep 2, 2014
Shape measurement apparatus, and shape measurement method
CANON KK1 citations51
NAKAUCHI AKIHIRO
3 patentsUS8314937B2Nov 20, 2012
Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern
NAKAUCHI AKIHIRO1 citations48
US9719773B2Aug 1, 2017
Measuring method and measuring apparatus
NAKAUCHI AKIHIRO0 citations37
US8868366B2Oct 21, 2014
Calculation method and calculation apparatus
NAKAUCHI AKIHIRO0 citations37