Inventor
HU PING-YU
TW7 patents
⚠️ This page may combine multiple inventors who share the name “HU PING-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IND TECH RES INST
5 patentsUS6452201B1Sep 17, 2002
Wafer-mapping method of wafer load port equipment
IND TECH RES INST27 citations92
US6382896B1May 7, 2002
Front-opening unified pod closing/opening control structure
IND TECH RES INST38 citations91
US6896470B1May 24, 2005
Front-opening unified pod auto-loading structure
IND TECH RES INST39 citations90
US6997664B1Feb 14, 2006
Apparatus for loading/unloading wafers to and from semiconductor fabrication equipment
IND TECH RES INST7 citations71
US6669185B2Dec 30, 2003
Wafer loading system positioning method and device
IND TECH RES INST0 citations40