Inventor
LIN WU-LANG
TW6 patents
⚠️ This page may combine multiple inventors who share the name “LIN WU-LANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IND TECH RES INST
4 patentsUS6382896B1May 7, 2002
Front-opening unified pod closing/opening control structure
IND TECH RES INST38 citations91
US6896470B1May 24, 2005
Front-opening unified pod auto-loading structure
IND TECH RES INST39 citations90
US6220771B1Apr 24, 2001
Wafer backside protection apparatus
IND TECH RES INST30 citations89
US6669185B2Dec 30, 2003
Wafer loading system positioning method and device
IND TECH RES INST0 citations40