Inventor
SCHUEGRAF KLAUS FLORIAN
US21 patents
Patents
21 patentsUS6141204AOct 31, 2000
Capacitor constructions and semiconductor processing method of forming capacitor constructions
MICRON TECHNOLOGY INC44 citations94
US6730584B2May 4, 2004
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures
MICRON TECHNOLOGY INC21 citations91
US6611032B2Aug 26, 2003
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures
MICRON TECHNOLOGY INC17 citations91
US6908803B2Jun 21, 2005
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures
MICRON TECHNOLOGY INC12 citations82
US7009264B1Mar 7, 2006
Selective spacer to prevent metal oxide formation during polycide reoxidation
MICRON TECHNOLOGY INC8 citations74
US6645845B2Nov 11, 2003
Methods of forming interconnect regions of integrated circuitry
MICRON TECHNOLOGY INC4 citations74
US6333225B1Dec 25, 2001
Integrated circuitry and methods of forming circuitry
MICRON TECHNOLOGY INC10 citations74
US6156632ADec 5, 2000
Method of forming polycide structures
MICRON TECHNOLOGY INC9 citations73
US5776809AJul 7, 1998
Method for forming a capacitor
MICRON TECHNOLOGY INC12 citations73
US6140203AOct 31, 2000
Capacitor constructions and semiconductor processing method of forming capacitor constructions
MICRON TECHNOLOGY INC9 citations71
US5933723AAug 3, 1999
Capacitor constructions and semiconductor processing method of forming capacitor constructions
MICRON TECHNOLOGY INC7 citations71
US7067411B2Jun 27, 2006
Method to prevent metal oxide formation during polycide reoxidation
MICRON TECHNOLOGY INC4 citations63
US6812530B2Nov 2, 2004
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures
MICRON TECHNOLOGY INC2 citations63
US6797601B2Sep 28, 2004
Methods for forming wordlines, transistor gates, and conductive interconnects
MICRON TECHNOLOGY INC3 citations63
US6548852B2Apr 15, 2003
Integrated circuitry and methods of forming circuitry
MICRON TECHNOLOGY INC1 citations63
US6528436B1Mar 4, 2003
Method of forming silicon nitride layer directly on HSG polysilicon
MICRON TECHNOLOGY INC2 citations62
US6355549B1Mar 12, 2002
Method of forming polycide structures
MICRON TECHNOLOGY INC4 citations62
US6303965B1Oct 16, 2001
Resistor constructions and methods of forming resistor constructions
MICRON TECHNOLOGY INC4 citations62
US5771150AJun 23, 1998
Capacitor constructions
MICRON TECHNOLOGY INC1 citations60
US6784052B2Aug 31, 2004
Method of forming a capacitor with two diffusion barrier layers formed in the same step
MICRON TECHNOLOGY INC0 citations52
US6165838ADec 26, 2000
Method of forming a capacitor
MICRON TECHNOLOGY INC0 citations52