Inventor
POWELL CARL
US3 patents
Patents
3 patentsUS6730584B2May 4, 2004
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures
MICRON TECHNOLOGY INC21 citations91
US6611032B2Aug 26, 2003
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures
MICRON TECHNOLOGY INC17 citations91
US6908803B2Jun 21, 2005
Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures
MICRON TECHNOLOGY INC12 citations82