Inventor
KWAK HIDONG
US16 patents
⚠️ This page may combine multiple inventors who share the name “KWAK HIDONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
6 patentsUS7369233B2May 6, 2008
Optical system for measuring samples using short wavelength radiation
KLA TENCOR TECH CORP62 citations98
US6999180B1Feb 14, 2006
Optical film topography and thickness measurement
KLA TENCOR TECH CORP84 citations97
US7408641B1Aug 5, 2008
Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
KLA TENCOR TECH CORP20 citations91
US7869040B1Jan 11, 2011
Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
KLA TENCOR TECH CORP6 citations72
US7190441B1Mar 13, 2007
Methods and systems for preparing a sample for thin film analysis
KLA TENCOR TECH CORP9 citations67
US7295325B2Nov 13, 2007
Time-resolved measurement technique using radiation pulses
KLA TENCOR TECH CORP4 citations62
KLA TENCOR CORP
6 patentsUS7755764B2Jul 13, 2010
Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry
KLA TENCOR CORP40 citations92
US10605722B2Mar 31, 2020
Metrology system calibration refinement
KLA TENCOR CORP5 citations70
US9857291B2Jan 2, 2018
Metrology system calibration refinement
KLA TENCOR CORP5 citations70
US9574992B1Feb 21, 2017
Single wavelength ellipsometry with improved spot size capability
KLA TENCOR CORP5 citations68
US9110020B2Aug 18, 2015
Atmospheric molecular contamination control with local purging
KLA TENCOR CORP0 citations45
US10088413B2Oct 2, 2018
Spectral matching based calibration
KLA TENCOR CORP1 citations44
KWAK HIDONG
2 patentsSAMSUNG ELECTRONICS CO LTD
2 patentsUS12303307B2May 20, 2025
Semiconductor device measurement method using x-ray scattering and semiconductor device manufacturing method including the measurement method
SAMSUNG ELECTRONICS CO LTD0 citations55
US12436106B2Oct 7, 2025
Apparatus and method for inspecting semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations42