Inventor
WALSH PHILLIP
US22 patents
⚠️ This page may combine multiple inventors who share the name “WALSH PHILLIP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VUV ANALYTICS INC
7 patentsUS9116158B2Aug 25, 2015
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC13 citations91
US10641749B2May 5, 2020
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC3 citations83
US9976996B2May 22, 2018
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC2 citations72
US10338040B2Jul 2, 2019
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC0 citations51
US9891197B2Feb 13, 2018
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC0 citations51
US9696286B2Jul 4, 2017
Vacuum ultraviolet absorption spectroscopy system and method
VUV ANALYTICS INC0 citations51
US10302607B2May 28, 2019
Method for detailed and bulk classification analysis of complex samples using vacuum ultra-violet spectroscopy and gas chromatography
VUV ANALYTICS INC0 citations34
N & K TECHNOLOGY INC
4 patentsUS7349103B1Mar 25, 2008
System and method for high intensity small spot optical metrology
N & K TECHNOLOGY INC10 citations81
US6891628B2May 10, 2005
Method and apparatus for examining features on semi-transparent and transparent substrates
N & K TECHNOLOGY INC5 citations73
US7253909B1Aug 7, 2007
Phase shift measurement using transmittance spectra
N & K TECHNOLOGY INC2 citations62
US7212293B1May 1, 2007
Optical determination of pattern feature parameters using a scalar model having effective optical properties
N & K TECHNOLOGY INC5 citations61
METROSOL INC
3 patentsUS7511265B2Mar 31, 2009
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
METROSOL INC11 citations84
US7282703B2Oct 16, 2007
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
METROSOL INC17 citations84
US7663097B2Feb 16, 2010
Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement
METROSOL INC4 citations62
WALSH PHILLIP
3 patentsUS8867041B2Oct 21, 2014
Optical vacuum ultra-violet wavelength nanoimprint metrology
WALSH PHILLIP3 citations59
US8773662B2Jul 8, 2014
Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopy
WALSH PHILLIP0 citations49
US8564780B2Oct 22, 2013
Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work pieces
WALSH PHILLIP0 citations48
JORDAN VALLEY SEMICONDUCTORS
2 patentsUS7990549B2Aug 2, 2011
Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientation
JORDAN VALLEY SEMICONDUCTORS17 citations83
US7948631B2May 24, 2011
Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths
JORDAN VALLEY SEMICONDUCTORS4 citations62