Inventor

HABIRO MASANOBU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “HABIRO MASANOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI CHEMICAL CO LTD

1 patent

US7374474B2May 20, 2008

Polishing pad for CMP, method for polishing substrate using it and method for producing polishing pad for CMP

HITACHI CHEMICAL CO LTD14 citations78

ONO HIROSHI

1 patent

US8486837B2Jul 16, 2013

Polishing slurry for metal, and polishing method

ONO HIROSHI0 citations38

SATOU EIICHI

1 patent

US9022834B2May 5, 2015

Polishing solution for CMP and polishing method using the polishing solution

SATOU EIICHI0 citations32