Inventor
PATRAW ROBERT D
US9 patents
Patents
9 patentsUS7179706B2Feb 20, 2007
Permeable capacitor electrode
MICRON TECHNOLOGY INC93 citations97
US7514366B2Apr 7, 2009
Methods for forming shallow trench isolation
MICRON TECHNOLOGY INC42 citations96
US7329917B2Feb 12, 2008
Permeable capacitor electrode
MICRON TECHNOLOGY INC16 citations92
US7271464B2Sep 18, 2007
Liner for shallow trench isolation
MICRON TECHNOLOGY INC15 citations92
US6784069B1Aug 31, 2004
Permeable capacitor electrode
MICRON TECHNOLOGY INC23 citations92
US7919829B2Apr 5, 2011
Liner for shallow trench isolation
MICRON TECHNOLOGY INC9 citations84
US8012847B2Sep 6, 2011
Methods of forming trench isolation in the fabrication of integrated circuitry and methods of fabricating integrated circuitry
MICRON TECHNOLOGY INC15 citations82
US7387940B2Jun 17, 2008
Methods of forming trench isolation in the fabrication of integrated circuitry, methods of fabricating memory circuitry, integrated circuitry and memory integrated circuitry
MICRON TECHNOLOGY INC4 citations72
US8349699B2Jan 8, 2013
Methods of forming trench isolation in the fabrication of integrated circuitry and methods of fabricating integrated circuitry
MICRON TECHNOLOGY INC3 citations62