Inventor
KLYMKO NANCY R
US6 patents
Patents
6 patentsUS7276796B1Oct 2, 2007
Formation of oxidation-resistant seed layer for interconnect applications
IBM17 citations92
US7462527B2Dec 9, 2008
Method of forming nitride films with high compressive stress for improved PFET device performance
IBM14 citations89
US7838428B2Nov 23, 2010
Method of repairing process induced dielectric damage by the use of GCIB surface treatment using gas clusters of organic molecular species
IBM16 citations83
US7585765B2Sep 8, 2009
Formation of oxidation-resistant seed layer for interconnect applications
IBM14 citations83
US7804136B2Sep 28, 2010
Method of forming nitride films with high compressive stress for improved PFET device performance
IBM0 citations49
US7491660B2Feb 17, 2009
Method of forming nitride films with high compressive stress for improved PFET device performance
IBM0 citations49