Inventor

MORO YOSHIAKI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “MORO YOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

2 patents

US6953938B2Oct 11, 2005

Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus

HITACHI LTD35 citations92

US7276707B2Oct 2, 2007

Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus

HITACHI LTD9 citations73

ADVANTEST CORP

2 patents

US7800386B2Sep 21, 2010

Contact device and method for producing the same

ADVANTEST CORP4 citations58

US7554136B2Jun 30, 2009

Micro-switch device and method for manufacturing the same

ADVANTEST CORP3 citations58

CANON KK

1 patent

US6818911B2Nov 16, 2004

Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method

CANON KK46 citations92