Inventor

PARK SANGBONG

US32 patents

⚠️ This page may combine multiple inventors who share the name “PARK SANGBONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PARK SANGBONG

KLA CORP

Controlling a process for inspection of a specimen

Deep learning based defect detection

Design-assisted inspection for DRAM and 3D NAND devices

Unsupervised learning-based reference selection for enhanced defect inspection sensitivity

Optical image contrast metric for optical target search

Design-assisted inspection for DRAM and 3D NAND devices

Setting up inspection of a specimen

Inspection with previous step subtraction

Clustering sub-care areas based on noise characteristics

Image contrast metrics for deriving and improving imaging conditions

Selecting defect detection methods for inspection of a specimen

Detecting defects on specimens

Detecting defects on specimens

ASML MASKTOOLS BV

Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systems

Method and apparatus for performing dark field double dipole lithography (DDL)

Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systems

Method, program product and apparatus for improving calibration of resist models used in critical dimension calculation

Method and apparatus for performing dark field double dipole lithography (DDL)

Method and apparatus for generating OPC rules for placement of scattering bar features utilizing interface mapping technology

Method, program product and apparatus for obtaining short-range flare model parameters for lithography simulation tool

Method of performing multiple stage model calibration for optical imaging simulation models

KLA TENCOR CORP

Multi-model metrology

Optical-mode selection for multi-mode semiconductor inspection

Defect-location determination using correction loop for pixel alignment

SAMSUNG ELECTRONICS CO LTD

Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the same

Inspection device for inspecting wafer and method of inspecting wafer using the same

Inspection apparatus and method of manufacturing semiconductor device using the same

SAMSUNG ELECTRONIC DEVICES

Supporting base for controlling height, swivel and inclination of display means

KOLON INC

Polyester resin compositions for film

BERGER GABRIEL

Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation process

HSU DUAN-FU STEPHEN

Method and apparatus for performing dark field double dipole lithography (DDL)

IN HOH PETER

Method and apparatus of recognizing gesture with untouched way