Inventor
MORRISON GORDON
US6 patents
⚠️ This page may combine multiple inventors who share the name “MORRISON GORDON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
4 patentsUS6451692B1Sep 17, 2002
Preheating of chemical vapor deposition precursors
MICRON TECHNOLOGY INC69 citations95
US7105441B2Sep 12, 2006
Preheating of chemical vapor deposition precursors
MICRON TECHNOLOGY INC17 citations92
US7976897B2Jul 12, 2011
Thermal chemical vapor deposition methods, and thermal chemical vapor deposition systems
MICRON TECHNOLOGY INC14 citations83
US7204885B2Apr 17, 2007
Deposition system to provide preheating of chemical vapor deposition precursors
MICRON TECHNOLOGY INC12 citations83