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Inventor
IWASHITA TETSURO
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “IWASHITA TETSURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUDA SHUHEI
1 patent
US8877643B2
Nov 4, 2014
Method of polishing a silicon wafer
MATSUDA SHUHEI
2 citations
56
SUMCO CORP
1 patent
US7479204B2
Jan 20, 2009
Method of manufacturing semiconductor substrate and method of evaluating quality of semiconductor substrate
SUMCO CORP
4 citations
50
ISHIBASHI MASAYUKI
1 patent
US8815710B2
Aug 26, 2014
Silicon epitaxial wafer and method for production thereof
ISHIBASHI MASAYUKI
1 citations
48