Inventor
STENDER MATTHIAS
US23 patents
⚠️ This page may combine multiple inventors who share the name “STENDER MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
5 patentsUS7838329B2Nov 23, 2010
Antimony and germanium complexes useful for CVD/ALD of metal thin films
ADVANCED TECH MATERIALS55 citations98
US8008117B2Aug 30, 2011
Antimony and germanium complexes useful for CVD/ALD of metal thin films
ADVANCED TECH MATERIALS14 citations92
US8877549B2Nov 4, 2014
Low temperature deposition of phase change memory materials
ADVANCED TECH MATERIALS7 citations84
US8796068B2Aug 5, 2014
Tellurium compounds useful for deposition of tellurium containing materials
ADVANCED TECH MATERIALS12 citations84
US8709863B2Apr 29, 2014
Antimony and germanium complexes useful for CVD/ALD of metal thin films
ADVANCED TECH MATERIALS9 citations84
VERSUM MAT US LLC
4 patentsUS10253216B2Apr 9, 2019
Additives for barrier chemical mechanical planarization
VERSUM MAT US LLC4 citations71
US11111435B2Sep 7, 2021
Tungsten chemical mechanical planarization (CMP) with low dishing and low erosion topography
VERSUM MAT US LLC2 citations66
US11884859B2Jan 30, 2024
Tungsten chemical mechanical planarization (CMP) with low dishing and low erosion topography
VERSUM MAT US LLC0 citations56
US11643599B2May 9, 2023
Tungsten chemical mechanical polishing for reduced oxide erosion
VERSUM MAT US LLC0 citations52