Inventor · disambiguated record
Kyung-Yub Jeon
Also filed as: JEON KYUNG-YUB
22 granted patents·3 pending applications·160 citations·filing 2007–2020
94Inventor score
Top patents by PatentIndex Score
25 records- 0197US9105452B2Etching apparatus and etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Aug 11, 2015·53 cites·14 claims
- 0294US7550391B2Method for forming fine patterns of a semiconductor device using double patterningSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Jun 23, 2009·30 cites·46 claims
- 0393US7576010B2Method of forming pattern using fine pitch hard maskSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Aug 18, 2009·19 cites·28 claims
- 0491US10164057B1Vertical tunneling field effect transistor and method for manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Dec 25, 2018·7 cites·20 claims
- 0590US7601647B2Method of forming fine patterns of semiconductor device using double patterningSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Oct 13, 2009·17 cites·20 claims
- 0689US10566326B2Semiconductor devices including a device isolation region in a substrate and/or finSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Feb 18, 2020·7 cites·14 claims
- 0787US9607853B2Patterning method using metal mask and method of fabricating semiconductor device including the same patterning methodSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Mar 28, 2017·6 cites·11 claims
- 0883US9136094B2Method of plasma processing and apparatuses using the methodCHO JUNG HYUN·Filed 2013·Granted Sep 15, 2015·6 cites·18 claims
- 0976US7998874B2Method for forming hard mask patterns having a fine pitch and method for forming a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Aug 16, 2011·5 cites·12 claims
- 1072US10566207B2Semiconductor manufacturing methods for patterning line patterns to have reduced length variationSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Feb 18, 2020·2 cites·20 claims
- 1171US9754770B2Method and apparatus of diagnosing plasma in plasma spaceSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Sep 5, 2017·2 cites·19 claims
- 1268US9899497B2Method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Feb 20, 2018·1 cites·20 claims
- 1368US8029688B2Method of fine patterning semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2008·Granted Oct 4, 2011·2 cites·25 claims
- 1467US7935635B2Method of forming fine patterns of semiconductor devices using double patterningSAMSUNG ELECTRONICS CO LTD·Filed 2008·Granted May 3, 2011·2 cites·22 claims
- 1565US8349200B2Method of fine patterning semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2011·Granted Jan 8, 2013·1 cites·15 claims
- 1664US11443988B2Semiconductor device and method for manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Sep 13, 2022·0 cites·10 claims
- 1758US10840150B2Semiconductor device and method for manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Nov 17, 2020·0 cites·13 claims
- 1857US10804160B2Semiconductor device and method of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Oct 13, 2020·0 cites·13 claims
- 1954US10892347B2Vertical tunneling field effect transistor and method for manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Jan 12, 2021·0 cites·19 claims
- 2053US10373878B2Semiconductor device and method of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Aug 6, 2019·0 cites·20 claims
- 2143US2014273484A1Inductively coupled plasma processing apparatus and plasma processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2014·Application pending·0 cites
- 2237US8039345B2Methods of forming semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 2010·Granted Oct 18, 2011·0 cites·18 claims
- 2336US2015079757A1Method of fabricating semiconductor deviceJEON KYUNG-YUB·Filed 2014·Application pending·0 cites
- 2435US2016293444A1Method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2015·Application pending·0 cites
- 2531US8563371B2Method of forming semiconductor deviceJEON KYUNG-YUB·Filed 2011·Granted Oct 22, 2013·0 cites·17 claims
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