P

Inventor

CHUNG CHIN-WOOK

KR10 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG CHIN-WOOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IUCF HYU

3 patents
US12525459B2Jan 13, 2026

Etching apparatus and etching method using the same

IUCF HYU0 citations50
US12406834B2Sep 2, 2025

Substrate processing apparatus and substrate processing method

IUCF HYU0 citations47
US12469679B2Nov 11, 2025

Substrate treating apparatus

IUCF HYU0 citations40

SAMSUNG ELECTRONICS CO LTD

2 patents
US9754770B2Sep 5, 2017

Method and apparatus of diagnosing plasma in plasma space

SAMSUNG ELECTRONICS CO LTD2 citations72
US8343309B2Jan 1, 2013

Substrate processing apparatus

SAMSUNG ELECTRONICS CO LTD1 citations42

KOREA RES INST OF STANDARDS

1 patent
US7696758B2Apr 13, 2010

Plasma diagnostic apparatus and method

KOREA RES INST OF STANDARDS8 citations83

YONWOO CO LTD

1 patent
US9566596B2Feb 14, 2017

Spray pump

YONWOO CO LTD8 citations79

JEON HYEONG-TAG

1 patent
US8207470B2Jun 26, 2012

Apparatus for generating remote plasma

JEON HYEONG-TAG2 citations55

INDUSTRY-UNIV COOP FOUND HANYANG UNIV

1 patent
US9437399B2Sep 6, 2016

Plasma equipment

INDUSTRY-UNIV COOP FOUND HANYANG UNIV0 citations40

INDUSTRY-UNIV COOPERATION FOUNDATION HANYANG UNIV

1 patent
US9837825B2Dec 5, 2017

Transmitter for transmitting wireless power

INDUSTRY-UNIV COOPERATION FOUNDATION HANYANG UNIV0 citations38