Inventor
TSUNO NATSUKI
JP41 patents
⚠️ This page may combine multiple inventors who share the name “TSUNO NATSUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
36 patentsUS11043359B2Jun 22, 2021
Charged particle beam apparatus and charged particle beam inspection system
HITACHI HIGH TECH CORP14 citations85
US9659744B2May 23, 2017
Charged particle beam apparatus and inspection method using the same
HITACHI HIGH TECH CORP7 citations84
US9236220B2Jan 12, 2016
Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope
HITACHI HIGH TECH CORP8 citations84
US11011348B2May 18, 2021
Scanning electron microscope and sample observation method using scanning electron microscope
HITACHI HIGH TECH CORP8 citations83
US10971347B2Apr 6, 2021
Charged particle beam apparatus
HITACHI HIGH TECH CORP9 citations83
US10879037B2Dec 29, 2020
Charged particle beam device with distance setting between irradiation regions in a scan line
HITACHI HIGH TECH CORP8 citations83
US11398367B2Jul 26, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP4 citations72
US11398366B2Jul 26, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations72
US11355308B2Jun 7, 2022
Charged particle beam device
HITACHI HIGH TECH CORP2 citations72
US10121632B2Nov 6, 2018
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations72
US11393657B2Jul 19, 2022
Electron beam device
HITACHI HIGH TECH CORP2 citations71
US10121634B2Nov 6, 2018
Charged particle beam device and charged particle beam measurement method
HITACHI HIGH TECH CORP2 citations71
US7633303B2Dec 15, 2009
Semiconductor wafer inspection apparatus
HITACHI HIGH TECH CORP2 citations63
US12394041B2Aug 19, 2025
System for deriving electrical characteristics and non-transitory computer-readable medium
HITACHI HIGH TECH CORP0 citations62
US12001521B2Jun 4, 2024
Adjusting method of charged particle beam device and charged particle beam device system
HITACHI HIGH TECH CORP0 citations62
US11749494B2Sep 5, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations62
US11694325B2Jul 4, 2023
System for deriving electrical characteristics and non-transitory computer-readable medium
HITACHI HIGH TECH CORP0 citations62
US11646172B2May 9, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations62
US11631568B2Apr 18, 2023
Device defect detection method using a charged particle beam
HITACHI HIGH TECH CORP0 citations62
US11043358B2Jun 22, 2021
Measuring apparatus and method of setting observation condition
HITACHI HIGH TECH CORP1 citations62
US7910884B2Mar 22, 2011
Apparatus and method for inspection and measurement
HITACHI HIGH TECH CORP2 citations62
US12450715B2Oct 21, 2025
System for deriving electrical characteristics and non-transitory computer-readable medium
HITACHI HIGH TECH CORP0 citations61
US11776103B2Oct 3, 2023
System for deriving electrical characteristics and non-transitory computer-readable medium
HITACHI HIGH TECH CORP0 citations61
US11328897B2May 10, 2022
Charged particle beam device
HITACHI HIGH TECH CORP1 citations61
US12406826B2Sep 2, 2025
Charged particle beam device and sample observation method
HITACHI HIGH TECH CORP0 citations51
US12196802B2Jan 14, 2025
Semiconductor inspection device and method for inspecting semiconductor sample
HITACHI HIGH TECH CORP0 citations51
US11869745B2Jan 9, 2024
Charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US11335535B2May 17, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations51
US9202668B2Dec 1, 2015
Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen
HITACHI HIGH TECH CORP0 citations51
US11610754B2Mar 21, 2023
Charged particle beam device
HITACHI HIGH TECH CORP0 citations49
US12573586B2Mar 10, 2026
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations48
US12437962B2Oct 7, 2025
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations48
US12181513B2Dec 31, 2024
Inspection method
HITACHI HIGH TECH CORP0 citations48
US11232929B2Jan 25, 2022
Method for determining irradiation conditions for charged particle beam device and charged particle beam device
HITACHI HIGH TECH CORP0 citations48
US11183362B2Nov 23, 2021
Charged particle beam apparatus and sample observation method using the same
HITACHI HIGH TECH CORP0 citations48
US10453648B2Oct 22, 2019
Charged particle bean device and information-processing device
HITACHI HIGH TECH CORP0 citations39
HITACHI LTD
3 patentsUS9508611B2Nov 29, 2016
Semiconductor inspection method, semiconductor inspection device and manufacturing method of semiconductor element
HITACHI LTD3 citations71
US10256068B2Apr 9, 2019
Charged particle beam apparatus
HITACHI LTD0 citations51
US9846133B2Dec 19, 2017
Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam
HITACHI LTD0 citations41