P

Inventor

LIU TZU-YU

US23 patents
⚠️ This page may combine multiple inventors who share the name “LIU TZU-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

13 patents
US9281253B2Mar 8, 2016

Determination of gain for eddy current sensor

APPLIED MATERIALS INC28 citations94
US9636797B2May 2, 2017

Adjusting eddy current measurements

APPLIED MATERIALS INC11 citations84
US9205527B2Dec 8, 2015

In-situ monitoring system with monitoring of elongated region

APPLIED MATERIALS INC7 citations84
US12320883B2Jun 3, 2025

Resistivity-based adjustment of thresholds for in-situ monitoring

APPLIED MATERIALS INC1 citations74
US11199605B2Dec 14, 2021

Resistivity-based adjustment of measurements from in-situ monitoring

APPLIED MATERIALS INC1 citations73
US11079459B2Aug 3, 2021

Resistivity-based calibration of in-situ electromagnetic inductive monitoring

APPLIED MATERIALS INC1 citations73
US10562148B2Feb 18, 2020

Real time profile control for chemical mechanical polishing

APPLIED MATERIALS INC6 citations73
US10556315B2Feb 11, 2020

Determination of gain for eddy current sensor

APPLIED MATERIALS INC1 citations73
US9472475B2Oct 18, 2016

Feedback control using detection of clearance and adjustment for uniform topography

APPLIED MATERIALS INC2 citations63
US11004708B2May 11, 2021

Core configuration with alternating posts for in-situ electromagnetic induction monitoring system

APPLIED MATERIALS INC1 citations62
US10207386B2Feb 19, 2019

Determination of gain for eddy current sensor

APPLIED MATERIALS INC1 citations62
US10427272B2Oct 1, 2019

Endpoint detection with compensation for filtering

APPLIED MATERIALS INC0 citations52
US9275917B2Mar 1, 2016

Determination of gain for eddy current sensor

APPLIED MATERIALS INC0 citations41

IND TECH RES INST

5 patents

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

3 patents

FREENOME HOLDINGS INC

2 patents