Inventor
LIU TZU-YU
US23 patents
⚠️ This page may combine multiple inventors who share the name “LIU TZU-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS9281253B2Mar 8, 2016
Determination of gain for eddy current sensor
APPLIED MATERIALS INC28 citations94
US9636797B2May 2, 2017
Adjusting eddy current measurements
APPLIED MATERIALS INC11 citations84
US9205527B2Dec 8, 2015
In-situ monitoring system with monitoring of elongated region
APPLIED MATERIALS INC7 citations84
US12320883B2Jun 3, 2025
Resistivity-based adjustment of thresholds for in-situ monitoring
APPLIED MATERIALS INC1 citations74
US11199605B2Dec 14, 2021
Resistivity-based adjustment of measurements from in-situ monitoring
APPLIED MATERIALS INC1 citations73
US11079459B2Aug 3, 2021
Resistivity-based calibration of in-situ electromagnetic inductive monitoring
APPLIED MATERIALS INC1 citations73
US10562148B2Feb 18, 2020
Real time profile control for chemical mechanical polishing
APPLIED MATERIALS INC6 citations73
US10556315B2Feb 11, 2020
Determination of gain for eddy current sensor
APPLIED MATERIALS INC1 citations73
US9472475B2Oct 18, 2016
Feedback control using detection of clearance and adjustment for uniform topography
APPLIED MATERIALS INC2 citations63
US11004708B2May 11, 2021
Core configuration with alternating posts for in-situ electromagnetic induction monitoring system
APPLIED MATERIALS INC1 citations62
US10207386B2Feb 19, 2019
Determination of gain for eddy current sensor
APPLIED MATERIALS INC1 citations62
US10427272B2Oct 1, 2019
Endpoint detection with compensation for filtering
APPLIED MATERIALS INC0 citations52
US9275917B2Mar 1, 2016
Determination of gain for eddy current sensor
APPLIED MATERIALS INC0 citations41
IND TECH RES INST
5 patentsUS10944115B2Mar 9, 2021
Cathode layer and membrane electrode assembly of solid oxide fuel cell
IND TECH RES INST0 citations54
US11811021B2Nov 7, 2023
Precursor structure, lamination film of the same, and manufacturing method of ion-conducting layer using the same
IND TECH RES INST0 citations50
US11939268B2Mar 26, 2024
Low-k material and method for manufacturing the same
IND TECH RES INST0 citations49
US9766193B2Sep 19, 2017
Liquid concentration detecting device
IND TECH RES INST1 citations41
US10274443B2Apr 30, 2019
Urea concentration identification method
IND TECH RES INST0 citations33
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
3 patentsUS10811257B2Oct 20, 2020
Techniques for forming low stress etch-resistant mask using implantation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations59
US10354875B1Jul 16, 2019
Techniques for improved removal of sacrificial mask
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations55
US10515802B2Dec 24, 2019
Techniques for forming low stress mask using implantation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations52