Inventor
KOGUCHI MASANARI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “KOGUCHI MASANARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
16 patentsUS6570156B1May 27, 2003
Autoadjusting electron microscope
HITACHI LTD100 citations98
US6838667B2Jan 4, 2005
Method and apparatus for charged particle beam microscopy
HITACHI LTD59 citations96
US6051834AApr 18, 2000
Electron microscope
HITACHI LTD65 citations96
US5866905AFeb 2, 1999
Electron microscope
HITACHI LTD74 citations96
US5362972ANov 8, 1994
Semiconductor device using whiskers
HITACHI LTD192 citations96
US6888139B2May 3, 2005
Electron microscope
HITACHI LTD28 citations92
US6750451B2Jun 15, 2004
Observation apparatus and observation method using an electron beam
HITACHI LTD32 citations92
US5932880AAug 3, 1999
Scintillator device and image pickup apparatus using the same
HITACHI LTD24 citations92
US5552602ASep 3, 1996
Electron microscope
HITACHI LTD41 citations92
US5717207AFeb 10, 1998
Transmission electron microscope with camera system
HITACHI LTD16 citations74
US9752997B2Sep 5, 2017
Charged-particle-beam analysis device and analysis method
HITACHI LTD4 citations71
US9601308B2Mar 21, 2017
Spectroscopic element and charged particle beam device using the same
HITACHI LTD3 citations71
US7518111B1Apr 14, 2009
Magnetic electron microscope
HITACHI LTD2 citations63
US7141790B2Nov 28, 2006
Defect inspection instrument and positron beam apparatus
HITACHI LTD4 citations62
US10088450B2Oct 2, 2018
Method for evaluating structural change during production process, and analysis program
HITACHI LTD0 citations42
US10627354B2Apr 21, 2020
Substitution site measuring equipment and substitution site measuring method
HITACHI LTD0 citations40
HITACHI HIGH TECH CORP
5 patentsUS7417227B2Aug 26, 2008
Scanning interference electron microscope
HITACHI HIGH TECH CORP22 citations92
US7372029B2May 13, 2008
Scanning transmission electron microscope and scanning transmission electron microscopy
HITACHI HIGH TECH CORP15 citations92
US7633064B2Dec 15, 2009
Electric charged particle beam microscopy and electric charged particle beam microscope
HITACHI HIGH TECH CORP11 citations84
US7372051B2May 13, 2008
Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system
HITACHI HIGH TECH CORP19 citations83
US7227144B2Jun 5, 2007
Scanning transmission electron microscope and scanning transmission electron microscopy
HITACHI HIGH TECH CORP7 citations73