Inventor · disambiguated record
Byeonghwan Jeon
Also filed as: JEON BYEONGHWAN
6 granted patents·2 pending applications·68 citations·filing 1996–2019
79Inventor score
Files withSAMSUNG ELECTRONICS CO LTD8
Top patents by PatentIndex Score
8 records- 0179US10474133B2Inspection device for inspecting wafer and method of inspecting wafer using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Nov 12, 2019·3 cites·20 claims
- 0273US10489902B2Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 26, 2019·2 cites·18 claims
- 0368US5742383AApparatus for measuring degree of inclination of objective lens for optical pickupSAMSUNG ELECTRONICS CO LTD·Filed 1996·Granted Apr 21, 1998·24 cites·6 claims
- 0465US5883610AGraphics overlay deviceSAMSUNG ELECTRONICS CO LTD·Filed 1996·Granted Mar 16, 1999·38 cites·2 claims
- 0563US9915623B2Optical inspection apparatus, a method of inspecting a substrate, and a method of treating a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Mar 13, 2018·1 cites·17 claims
- 0648US2015308654A1Surface light source using arrayed point light sourcesSAMSUNG ELECTRONICS CO LTD·Filed 2014·Application pending·0 cites
- 0743US10732129B2Apparatus for and method of performing inspection and metrology processSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Aug 4, 2020·0 cites·16 claims
- 0834US2018164227A1Substrate inspection systemSAMSUNG ELECTRONICS CO LTD·Filed 2017·Application pending·0 cites
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