Inventor
JIANG YOUFEI
US12 patents
⚠️ This page may combine multiple inventors who share the name “JIANG YOUFEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS11152191B2Oct 19, 2021
In-lens wafer pre-charging and inspection with multiple beams
ASML NETHERLANDS BV3 citations69
US12191109B2Jan 7, 2025
Sample pre-charging methods and apparatuses for charged particle beam inspection
ASML NETHERLANDS BV0 citations62
US11676792B2Jun 13, 2023
Sample pre-charging methods and apparatuses for charged particle beam inspection
ASML NETHERLANDS BV0 citations62
US12374524B2Jul 29, 2025
In-lens wafer PE-charging and inspection with multiple beams
ASML NETHERLANDS BV0 citations58
US12165837B2Dec 10, 2024
System and method for scanning a sample using multi-beam inspection apparatus
ASML NETHERLANDS BV0 citations58
US11469076B2Oct 11, 2022
System and method for scanning a sample using multi-beam inspection apparatus
ASML NETHERLANDS BV0 citations56
KLA CORP
6 patentsUS12451319B2Oct 21, 2025
Electron source with magnetic suppressor electrode
KLA CORP0 citations60
US12283453B2Apr 22, 2025
Creating multiple electron beams with a photocathode film
KLA CORP0 citations60
US12165831B2Dec 10, 2024
Method and system of image-forming multi-electron beams
KLA CORP1 citations60
US12592357B2Mar 31, 2026
System and method for multi-beam electron microscopy using a detector array
KLA CORP0 citations50
US11749495B2Sep 5, 2023
Bandpass charged particle energy filtering detector for charged particle tools
KLA CORP0 citations50
US12068129B2Aug 20, 2024
Tilt-column multi-beam electron microscopy system and method
KLA CORP0 citations49