Inventor
YIN WEIHUA
US6 patents
⚠️ This page may combine multiple inventors who share the name “YIN WEIHUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS11152191B2Oct 19, 2021
In-lens wafer pre-charging and inspection with multiple beams
ASML NETHERLANDS BV3 citations69
US12374524B2Jul 29, 2025
In-lens wafer PE-charging and inspection with multiple beams
ASML NETHERLANDS BV0 citations58
US12165837B2Dec 10, 2024
System and method for scanning a sample using multi-beam inspection apparatus
ASML NETHERLANDS BV0 citations58
US11469076B2Oct 11, 2022
System and method for scanning a sample using multi-beam inspection apparatus
ASML NETHERLANDS BV0 citations56
US12555740B2Feb 17, 2026
Charged particle system, aperture array, charged particle tool and method of operating a charged particle system
ASML NETHERLANDS BV0 citations40