Inventor
NAGAMATSU TAKAHITO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “NAGAMATSU TAKAHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
4 patentsUS5429995AJul 4, 1995
Method of manufacturing silicon oxide film containing fluorine
TOSHIBA KK421 citations97
US5641581AJun 24, 1997
Semiconductor device
TOSHIBA KK20 citations91
US7605076B2Oct 20, 2009
Method of manufacturing a semiconductor device from which damage layers and native oxide films in connection holes have been removed
TOSHIBA KK2 citations61
US9269540B2Feb 23, 2016
Ion implantation apparatus and method of determining state of ion implantation apparatus
TOSHIBA KK0 citations35