Inventor
MARCUS STEVEN D
US13 patents
⚠️ This page may combine multiple inventors who share the name “MARCUS STEVEN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS11230763B2Jan 25, 2022
Gas separation control in spatial atomic layer deposition
APPLIED MATERIALS INC2 citations72
US10570511B2Feb 25, 2020
Gas separation control in spatial atomic layer deposition
APPLIED MATERIALS INC2 citations72
US12431361B2Sep 30, 2025
Self-aligned double patterning with spatial atomic layer deposition
APPLIED MATERIALS INC0 citations62
US11821083B2Nov 21, 2023
Gas separation control in spatial atomic layer deposition
APPLIED MATERIALS INC0 citations62
US11658014B2May 23, 2023
Apparatuses and methods of protecting nickel and nickel containing components with thin films
APPLIED MATERIALS INC0 citations62
US11164753B2Nov 2, 2021
Self-aligned double patterning with spatial atomic layer deposition
APPLIED MATERIALS INC1 citations62
US12305275B2May 20, 2025
Corrosion resistant film on a chamber component and methods of depositing thereof
APPLIED MATERIALS INC0 citations60
US11932938B2Mar 19, 2024
Corrosion resistant film on a chamber component and methods of depositing thereof
APPLIED MATERIALS INC0 citations60
US12074010B2Aug 27, 2024
Atomic layer deposition part coating chamber
APPLIED MATERIALS INC1 citations52
US12486571B2Dec 2, 2025
Atomic layer deposition coating system for inner walls of gas lines
APPLIED MATERIALS INC0 citations43
US11946140B2Apr 2, 2024
Hot showerhead
APPLIED MATERIALS INC0 citations43