Inventor
LEE JI-HWAN
KR14 patents
⚠️ This page may combine multiple inventors who share the name “LEE JI-HWAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
7 patentsUS12004268B2Jun 4, 2024
Transferring unit, substrate treating apparatus including the same, and substrate treating method
SEMES CO LTD0 citations60
US12146710B2Nov 19, 2024
Substrate treating apparatus and substrate treating system comprising the same
SEMES CO LTD0 citations57
US12142492B2Nov 12, 2024
Method for treating substrate and apparatus for treating substrate
SEMES CO LTD1 citations57
US12327735B2Jun 10, 2025
Apparatus and method for processing substrate
SEMES CO LTD0 citations49
US12451358B2Oct 21, 2025
Method for fabricating semiconductor device and apparatus for processing substrate using plasma
SEMES CO LTD0 citations47
US12341030B2Jun 24, 2025
Support unit and substrate treating apparatus
SEMES CO LTD0 citations47
US12463015B2Nov 4, 2025
Substrate processing apparatus and method using the plasma
SEMES CO LTD0 citations46