Inventor
CHIU YA-CHIN
TW4 patents
Patents
4 patentsUS11978703B2May 7, 2024
Semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11908800B2Feb 20, 2024
Semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11515256B2Nov 29, 2022
Semiconductor structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12165935B2Dec 10, 2024
Physical vapor deposition process apparatus and method of optimizing thickness of a target material film deposited using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48