Inventor

HONG SANGJOON

KR3 patents

Patents

3 patents

US12313393B2May 27, 2025

Level sensor and substrate processing apparatus including the same

SAMSUNG ELECTRONICS CO LTD0 citations47

US12557587B2Feb 17, 2026

Apparatus and method monitoring semiconductor manufacturing equipment

SAMSUNG ELECTRONICS CO LTD0 citations46

US9690200B2Jun 27, 2017

Optical apparatus and manufacturing method using the same

SAMSUNG ELECTRONICS CO LTD1 citations43