Inventor

BERGLUND C NEIL

US8 patents

⚠️ This page may combine multiple inventors who share the name “BERGLUND C NEIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ETEC SYSTEMS INC

3 patents

US5103101AApr 7, 1992

Multiphase printing for E-beam lithography

ETEC SYSTEMS INC154 citations95

US6220914B1Apr 24, 2001

Method of forming gated photocathode for controlled single and multiple electron beam emission

ETEC SYSTEMS INC42 citations92

US5393987AFeb 28, 1995

Dose modulation and pixel deflection for raster scan lithography

ETEC SYSTEMS INC96 citations92

NORTHWEST TECHNOLOGY CORP

1 patent

US5086477AFeb 4, 1992

Automated system for extracting design and layout information from an integrated circuit

NORTHWEST TECHNOLOGY CORP222 citations95

APPLIED MATERIALS INC

1 patent

US6376985B2Apr 23, 2002

Gated photocathode for controlled single and multiple electron beam emission

APPLIED MATERIALS INC25 citations92

(unassigned)

1 patent

US6145438ANov 14, 2000

Method and apparatus for direct writing of semiconductor die using microcolumn array

50 citations91

UNIV OREGON HEALTH & SCIENCE

1 patent

US6803582B2Oct 12, 2004

One dimensional beam blanker array

UNIV OREGON HEALTH & SCIENCE9 citations72

INTEL CORP

1 patent

US4409259AOct 11, 1983

MOS Dynamic RAM cell and method of fabrication

INTEL CORP3 citations60