Inventor
OHASHI TSUNEAKI
JP49 patents
⚠️ This page may combine multiple inventors who share the name “OHASHI TSUNEAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
45 patentsUS6783875B2Aug 31, 2004
Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members
NGK INSULATORS LTD471 citations99
US6160244ADec 12, 2000
Susceptors
NGK INSULATORS LTD573 citations99
US6239402B1May 29, 2001
Aluminum nitride-based sintered bodies, corrosion-resistant members, metal-buried articles and semiconductor-holding apparatuses
NGK INSULATORS LTD357 citations98
US6139983AOct 31, 2000
Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same
NGK INSULATORS LTD370 citations98
US6641941B2Nov 4, 2003
Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation
NGK INSULATORS LTD64 citations96
US5514347AMay 7, 1996
Honeycomb structure and a method of making same
NGK INSULATORS LTD63 citations96
US5427601AJun 27, 1995
Sintered metal bodies and manufacturing method therefor
NGK INSULATORS LTD73 citations96
US6632549B1Oct 14, 2003
Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same
NGK INSULATORS LTD57 citations95
US7019956B2Mar 28, 2006
Electrostatic chuck having bonded structure and method of manufacturing the same
NGK INSULATORS LTD21 citations93
US6486542B1Nov 26, 2002
Semiconductor-supporting devices, processes for the production of the same, joined bodies and processes for the production of the same
NGK INSULATORS LTD20 citations93
US6447626B1Sep 10, 2002
Method for producing joined body of ALN substrates and joining agent used for the joining
NGK INSULATORS LTD22 citations93
US6328198B1Dec 11, 2001
Method of manufacturing joint body
NGK INSULATORS LTD28 citations93
US6294771B2Sep 25, 2001
Electrically heated substrate with multiple ceramic parts each having different volume resitivities
NGK INSULATORS LTD16 citations93
US6268069B1Jul 31, 2001
Joined articles and a process for producing such joined articles
NGK INSULATORS LTD19 citations93
US6261708B1Jul 17, 2001
Joined body of aluminum nitride series ceramics, method of joining aluminum nitride series ceramics and joining agent
NGK INSULATORS LTD45 citations93
US6204489B1Mar 20, 2001
Electrically heated substrate with multiple ceramic parts each having different volume restivities
NGK INSULATORS LTD40 citations93
US6156686ADec 5, 2000
Porous composite ceramic sintered bodies and a production process thereof
NGK INSULATORS LTD24 citations93
US6051303AApr 18, 2000
Semiconductor supporting device
NGK INSULATORS LTD40 citations93
US6028022AFeb 22, 2000
Method for producing joined body of a1n substrates and joining agent used for the joining
NGK INSULATORS LTD21 citations93
US5998321ADec 7, 1999
Aluminum nitride sintered body, electronic functional material, and electrostatic chuck
NGK INSULATORS LTD28 citations93
US7138192B2Nov 21, 2006
Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation
NGK INSULATORS LTD38 citations92
US6756132B2Jun 29, 2004
Joined structures of metal terminals and ceramic members, joined structures of metal members and ceramic members, and adhesive materials
NGK INSULATORS LTD17 citations92
US6486084B2Nov 26, 2002
Composite material and method of producing the same
NGK INSULATORS LTD19 citations92
US6562183B1May 13, 2003
Anti-corrosive parts for etching apparatus
NGK INSULATORS LTD16 citations83
US4925816AMay 15, 1990
Novel solid solution, heat-resistant sintered body and method of producing the same
NGK INSULATORS LTD18 citations82
US6869689B2Mar 22, 2005
Joined structures of metal terminals and ceramic members, joined structures of metal members and ceramic members, and adhesive materials
NGK INSULATORS LTD6 citations74
US5993699ANov 30, 1999
Aluminum nitride based composite body electronic functional material, electrostatic chuck and method of producing aluminum nitride based composite body
NGK INSULATORS LTD12 citations74
US5445786AAug 29, 1995
Heat-resistant metal monolith and manufacturing method therefor
NGK INSULATORS LTD15 citations74
US5292485AMar 8, 1994
Heat-resistant metal monolith
NGK INSULATORS LTD8 citations74
US5254510AOct 19, 1993
Heat resistive phosphate sintered bodies and a process for producing the same
NGK INSULATORS LTD16 citations74
US5217934AJun 8, 1993
Heat resistive phosphate-zircon composite bodies and process for producing same
NGK INSULATORS LTD10 citations74
US5128288AJul 7, 1992
Phosphate compounds, sintered bodies thereof and manufacture of the sintered bodies
NGK INSULATORS LTD8 citations74
US5064609ANov 12, 1991
Method of sintering a sinterable metal powder honeycomb monolith structure
NGK INSULATORS LTD8 citations74
US4888312ADec 19, 1989
Zirconyl phosphate sintered bodies and production thereof
NGK INSULATORS LTD6 citations74
US4883781ANov 28, 1989
Heat resisting low expansion zirconyl phosphate-zircon composite
NGK INSULATORS LTD10 citations74
US5531837AJul 2, 1996
Method for increasing oxidation resistance of Fe-Cr-Al alloy
NGK INSULATORS LTD7 citations73
US6436545B1Aug 20, 2002
Joint body of ceramic member and metal member and method of producing the same
NGK INSULATORS LTD13 citations71
US6749930B2Jun 15, 2004
Corrosion-resistive members
NGK INSULATORS LTD4 citations63
US6541406B1Apr 1, 2003
Silicon nitride sintered material and process for production thereof
NGK INSULATORS LTD4 citations63
US5330703AJul 19, 1994
Process for firing alloys containing easily oxidizable elements
NGK INSULATORS LTD2 citations63
US4968648ANov 6, 1990
Heat-resisting phosphate based compound sintered bodies and production thereof
NGK INSULATORS LTD5 citations63
US6365460B1Apr 2, 2002
Production of silicon carbide bodies
NGK INSULATORS LTD3 citations62
US6706428B2Mar 16, 2004
Ceramic sintered bodies and a method of producing the same
NGK INSULATORS LTD6 citations61
US6479174B1Nov 12, 2002
Silicon carbide body
NGK INSULATORS LTD3 citations61
US8033819B2Oct 11, 2011
Mold and molding method
NGK INSULATORS LTD1 citations49