Inventor
ENDO TETSUYA
JP23 patents
⚠️ This page may combine multiple inventors who share the name “ENDO TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENDO TETSUYA
5 patentsUS9058962B2Jun 16, 2015
Magnet unit and magnetron sputtering apparatus
ENDO TETSUYA9 citations82
US8776542B2Jul 15, 2014
Cooling system
ENDO TETSUYA6 citations71
US8673124B2Mar 18, 2014
Magnet unit and magnetron sputtering apparatus
ENDO TETSUYA3 citations61
US9299544B2Mar 29, 2016
Sputtering apparatus
ENDO TETSUYA0 citations40
US8778150B2Jul 15, 2014
Magnetron sputtering cathode, magnetron sputtering apparatus, and method of manufacturing magnetic device
ENDO TETSUYA0 citations40
CANON ANELVA CORP
5 patentsUS7785449B2Aug 31, 2010
Magnetron unit, magnetron sputtering apparatus, and method of manufacturing electronic device
CANON ANELVA CORP11 citations76
US7955480B2Jun 7, 2011
Sputtering apparatus and film deposition method
CANON ANELVA CORP4 citations62
US9911526B2Mar 6, 2018
Magnet unit and magnetron sputtering apparatus
CANON ANELVA CORP0 citations51
US8043483B2Oct 25, 2011
Film forming method by sputtering and sputtering apparatus thereof
CANON ANELVA CORP1 citations51
US8048277B2Nov 1, 2011
Magnet unit and magnetron sputtering apparatus
CANON ANELVA CORP0 citations41