Inventor
BIRKMAIER GEORGE
US4 patents
Patents
4 patentsUS6258220B1Jul 10, 2001
Electro-chemical deposition system
APPLIED MATERIALS INC443 citations98
US6254760B1Jul 3, 2001
Electro-chemical deposition system and method
APPLIED MATERIALS INC101 citations96
US6635157B2Oct 21, 2003
Electro-chemical deposition system
APPLIED MATERIALS INC43 citations95
US7497932B2Mar 3, 2009
Electro-chemical deposition system
APPLIED MATERIALS INC9 citations82