Inventor
PATEL VISHNUBHAI VITTHALBHAI
US31 patents
⚠️ This page may combine multiple inventors who share the name “PATEL VISHNUBHAI VITTHALBHAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
30 patentsUS6479110B2Nov 12, 2002
Multiphase low dielectric constant material and method of deposition
IBM175 citations99
US6437443B1Aug 20, 2002
Multiphase low dielectric constant material and method of deposition
IBM152 citations99
US6312793B1Nov 6, 2001
Multiphase low dielectric constant material
IBM320 citations99
US6140226AOct 31, 2000
Dual damascene processing for semiconductor chip interconnects
IBM363 citations99
US6448176B1Sep 10, 2002
Dual damascene processing for semiconductor chip interconnects
IBM102 citations98
US6316167B1Nov 13, 2001
Tunabale vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and application thereof
IBM189 citations98
US6265779B1Jul 24, 2001
Method and material for integration of fuorine-containing low-k dielectrics
IBM139 citations98
US6147009ANov 14, 2000
Hydrogenated oxidized silicon carbon material
IBM641 citations98
US5789320AAug 4, 1998
Plating of noble metal electrodes for DRAM and FRAM
IBM326 citations98
US6514667B2Feb 4, 2003
Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof
IBM108 citations97
US6497963B1Dec 24, 2002
Hydrogenated oxidized silicon carbon material
IBM84 citations97
US6428894B1Aug 6, 2002
Tunable and removable plasma deposited antireflective coatings
IBM146 citations96
US6346747B1Feb 12, 2002
Method for fabricating a thermally stable diamond-like carbon film as an intralevel or interlevel dielectric in a semiconductor device and device made
IBM59 citations96
US5981000ANov 9, 1999
Method for fabricating a thermally stable diamond-like carbon film
IBM55 citations96
US5945155AAug 31, 1999
Low dielectric constant amorphous fluorinated carbon and method of preparation
IBM73 citations96
US5942328AAug 24, 1999
Low dielectric constant amorphous fluorinated carbon and method of preparation
IBM34 citations96
US6448655B1Sep 10, 2002
Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation
IBM50 citations95
US5679269AOct 21, 1997
Diamond-like carbon for use in VLSI and ULSI interconnect systems
IBM66 citations95
US5674355AOct 7, 1997
Diamond-like carbon for use in VLSI and ULSI interconnect systems
IBM46 citations95
US6030904AFeb 29, 2000
Stabilization of low-k carbon-based dielectrics
IBM53 citations93
US5674638AOct 7, 1997
Fluorinated diamond-like carbon protective coating for magnetic recording media devices
IBM36 citations93
US6759321B2Jul 6, 2004
Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation
IBM24 citations92
US5663854ASep 2, 1997
Prebent ceramic suspension
IBM25 citations88
US6953984B2Oct 11, 2005
Hydrogenated oxidized silicon carbon material
IBM15 citations84
US6337518B1Jan 8, 2002
Low dielectric constant amorphous fluorinated carbon and method of preparation
IBM12 citations82
US5942769AAug 24, 1999
Low dielectric constant amorphous fluorinated carbon and method of preparation
IBM10 citations74
US4111857ASep 5, 1978
Highly conducting organometallic polymers
IBM18 citations74
US6724086B1Apr 20, 2004
Hydrogenated oxidized silicon carbon material
IBM6 citations73
US6049443AApr 11, 2000
Suspension bent by stressed patch
IBM9 citations73
US5963397AOct 5, 1999
Ceramic suspension bent by stressed patch
IBM6 citations73