Inventor
KANE BRITTIN C
US6 patents
⚠️ This page may combine multiple inventors who share the name “KANE BRITTIN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGERE SYST GUARDIAN CORP
3 patentsUS6326618B1Dec 4, 2001
Method of analyzing semiconductor surface with patterned feature using line width metrology
AGERE SYST GUARDIAN CORP28 citations91
US6258610B1Jul 10, 2001
Method analyzing a semiconductor surface using line width metrology with auto-correlation operation
AGERE SYST GUARDIAN CORP45 citations90
US6369891B1Apr 9, 2002
Method of determining accuracy error in line width metrology device
AGERE SYST GUARDIAN CORP11 citations72