Inventor
MCINTOSH JOHN M
US11 patents
⚠️ This page may combine multiple inventors who share the name “MCINTOSH JOHN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGERE SYST GUARDIAN CORP
4 patentsUS6326618B1Dec 4, 2001
Method of analyzing semiconductor surface with patterned feature using line width metrology
AGERE SYST GUARDIAN CORP28 citations91
US6258610B1Jul 10, 2001
Method analyzing a semiconductor surface using line width metrology with auto-correlation operation
AGERE SYST GUARDIAN CORP45 citations90
US6225639B1May 1, 2001
Method of monitoring a patterned transfer process using line width metrology
AGERE SYST GUARDIAN CORP49 citations89
US6369891B1Apr 9, 2002
Method of determining accuracy error in line width metrology device
AGERE SYST GUARDIAN CORP11 citations72
AGERE SYSTEMS INC
4 patentsUS7972440B2Jul 5, 2011
Monitoring and control of a fabrication process
AGERE SYSTEMS INC10 citations80
US6727720B2Apr 27, 2004
Probe having a microstylet
AGERE SYSTEMS INC14 citations80
US6577970B2Jun 10, 2003
Method of determining a crystallographic quality of a material located on a substrate
AGERE SYSTEMS INC5 citations60
US6627885B1Sep 30, 2003
Method of focused ion beam pattern transfer using a smart dynamic template
AGERE SYSTEMS INC0 citations50