Inventor
GOLLADAY STEVEN DOUGLAS
US6 patents
⚠️ This page may combine multiple inventors who share the name “GOLLADAY STEVEN DOUGLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
5 patentsUS6353231B1Mar 5, 2002
Pinhole detector for electron intensity distribution
NIKON CORP14 citations80
US6420713B1Jul 16, 2002
Image position and lens field control in electron beam systems
NIKON CORP10 citations72
US6005250ADec 21, 1999
Illumination deflection system for E-beam projection
NIKON CORP12 citations72
US6023067AFeb 8, 2000
Blanking system for electron beam projection system
NIKON CORP4 citations61
US6201251B1Mar 13, 2001
Compensation of space charge in a particle beam system
NIKON CORP1 citations45