Inventor
TERATANI NAOMI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TERATANI NAOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
9 patentsUS7803733B2Sep 28, 2010
Aluminum nitride sintered body and semiconductor manufacturing apparatus member
NGK INSULATORS LTD23 citations92
US7122490B2Oct 17, 2006
Aluminum nitride materials and members for use in the production of semiconductors
NGK INSULATORS LTD23 citations92
US7553787B2Jun 30, 2009
Aluminum nitride-based ceramic sintered body and member for semiconductor manufacturing device
NGK INSULATORS LTD5 citations73
US7422992B2Sep 9, 2008
Aluminum nitride sintered body, semiconductor manufacturing member, and method of manufacturing aluminum nitride sintered body
NGK INSULATORS LTD6 citations73
US7229940B2Jun 12, 2007
Dense cordierite based sintered body and method of manufacturing the same
NGK INSULATORS LTD3 citations62
US7148166B2Dec 12, 2006
Aluminum nitride ceramics and a member used for the production of semiconductors
NGK INSULATORS LTD5 citations62
US6919287B2Jul 19, 2005
Aluminum nitride materials and members used for the production of semiconductors
NGK INSULATORS LTD4 citations62
US8022001B2Sep 20, 2011
Aluminum nitride sintered product, method for producing the same, and electrostatic chuck including the same
NGK INSULATORS LTD0 citations52
US7763226B2Jul 27, 2010
Method of manufacturing an aluminum nitride powder
NGK INSULATORS LTD0 citations52
TERATANI NAOMI
3 patentsUS8178455B2May 15, 2012
Alumina sintered body, method for manufacturing the same, and semiconductor manufacturing apparatus member
TERATANI NAOMI7 citations82
US8236722B2Aug 7, 2012
Aluminum oxide sintered product and method for producing the same
TERATANI NAOMI2 citations60
US8231964B2Jul 31, 2012
Aluminum oxide sintered body, method for producing the same and member for semiconductor producing apparatus
TERATANI NAOMI0 citations50