Inventor
BOEBEL FRIEDRICH
DE12 patents
⚠️ This page may combine multiple inventors who share the name “BOEBEL FRIEDRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FRAUNHOFER GES FORSCHUNG
5 patentsUS5564830AOct 15, 1996
Method and arrangement for determining the layer-thickness and the substrate temperature during coating
FRAUNHOFER GES FORSCHUNG97 citations95
US5387309AFeb 7, 1995
Process for the measurement of the thickness and refractive index of a thin film on a substrate, and an apparatus for carrying out the process
FRAUNHOFER GES FORSCHUNG39 citations92
US5153674AOct 6, 1992
Semiconductor production control and/or measuring unit
FRAUNHOFER GES FORSCHUNG10 citations73
US5950180ASep 7, 1999
Process for the classification of objects
FRAUNHOFER GES FORSCHUNG6 citations60
US5654579AAug 5, 1997
Electronic component
FRAUNHOFER GES FORSCHUNG3 citations59