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Inventor
TAMARU MASAHIKO
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “TAMARU MASAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOTO LTD
1 patent
US7615133B2
Nov 10, 2009
Electrostatic chuck module and cooling system
TOTO LTD
33 citations
88
ANELVA CORP
1 patent
US7011744B2
Mar 14, 2006
Brine supply unit
ANELVA CORP
0 citations
37