Inventor
SONG JONG-HEUI
KR13 patents
Patents
13 patentsUS6239022B1May 29, 2001
Method of fabricating a contact in a semiconductor device
SAMSUNG ELECTRONICS CO LTD53 citations96
US6074519AJun 13, 2000
Plasma etching apparatus having a sealing member coupling an upper electrode to an etching chamber
SAMSUNG ELECTRONICS CO LTD20 citations89
US6124216ASep 26, 2000
Method of making intermetal dielectric layers having a low dielectric constant
SAMSUNG ELECTRONICS CO LTD43 citations88
US7667221B2Feb 23, 2010
Phase change memory devices and methods for fabricating the same
SAMSUNG ELECTRONICS CO LTD11 citations84
US7157770B2Jan 2, 2007
MOS transistor with recessed gate and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD12 citations84
US7745290B2Jun 29, 2010
Methods of fabricating semiconductor device including fin-fet
SAMSUNG ELECTRONICS CO LTD15 citations83
US6808975B2Oct 26, 2004
Method for forming a self-aligned contact hole in a semiconductor device
SAMSUNG ELECTRONICS CO LTD14 citations83
US8372198B2Feb 12, 2013
Methods of forming dual damascene structures
SAMSUNG ELECTRONICS CO LTD10 citations82
US7326619B2Feb 5, 2008
Method of manufacturing integrated circuit device including recessed channel transistor
SAMSUNG ELECTRONICS CO LTD10 citations82
US7531414B2May 12, 2009
Method of manufacturing integrated circuit device including recessed channel transistor
SAMSUNG ELECTRONICS CO LTD4 citations61
US7358126B2Apr 15, 2008
Dual damascene structure and methods of forming the same
SAMSUNG ELECTRONICS CO LTD3 citations61
US8003487B2Aug 23, 2011
Methods of manufacturing a semiconductor device using a layer suspended across a trench
SAMSUNG ELECTRONICS CO LTD4 citations58
US8039345B2Oct 18, 2011
Methods of forming semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations39