Inventor
PEREZ DIANA
US8 patents
⚠️ This page may combine multiple inventors who share the name “PEREZ DIANA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS6132632AOct 17, 2000
Method and apparatus for achieving etch rate uniformity in a reactive ion etcher
IBM25 citations86
US6001268ADec 14, 1999
Reactive ion etching of alumina/TiC substrates
IBM17 citations80
US6027660AFeb 22, 2000
Method of etching ceramics of alumina/TiC with high density plasma
IBM12 citations73
US6051099AApr 18, 2000
Apparatus for achieving etch rate uniformity
IBM6 citations58
HITACHI GLOBAL STORAGE TECH
3 patentsUS7560225B2Jul 14, 2009
Method of forming uniform features using photoresist
HITACHI GLOBAL STORAGE TECH6 citations58
US7481312B2Jan 27, 2009
Direct cooling pallet assembly for temperature stability for deep ion mill etch process
HITACHI GLOBAL STORAGE TECH2 citations58
US7296420B2Nov 20, 2007
Direct cooling pallet tray for temperature stability for deep ion mill etch process
HITACHI GLOBAL STORAGE TECH1 citations48