Inventor
ZHANG Z LISA
US10 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG Z LISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CORNELL RES FOUNDATION INC
8 patentsUS6051866AApr 18, 2000
Microstructures and single mask, single-crystal process for fabrication thereof
CORNELL RES FOUNDATION INC166 citations99
US5846849ADec 8, 1998
Microstructure and single mask, single-crystal process for fabrication thereof
CORNELL RES FOUNDATION INC160 citations99
US5719073AFeb 17, 1998
Microstructures and single mask, single-crystal process for fabrication thereof
CORNELL RES FOUNDATION INC254 citations99
US5536988AJul 16, 1996
Compound stage MEM actuator suspended for multidimensional motion
CORNELL RES FOUNDATION INC181 citations99
US5426070AJun 20, 1995
Microstructures and high temperature isolation process for fabrication thereof
CORNELL RES FOUNDATION INC178 citations99
US5844251ADec 1, 1998
High aspect ratio probes with self-aligned control electrodes
CORNELL RES FOUNDATION INC44 citations96
US5726073AMar 10, 1998
Compound stage MEM actuator suspended for multidimensional motion
CORNELL RES FOUNDATION INC54 citations96
US5506175AApr 9, 1996
Method of forming compound stage MEM actuator suspended for multidimensional motion
CORNELL RES FOUNDATION INC51 citations96