P

Inventor

RUAN JUNRU

US5 patents
⚠️ This page may combine multiple inventors who share the name “RUAN JUNRU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents
US11994845B2May 28, 2024

Determining a correction to a process

ASML NETHERLANDS BV2 citations71
US12493285B2Dec 9, 2025

Determining a correction to a process

ASML NETHERLANDS BV0 citations60
US11086305B2Aug 10, 2021

Determining a correction to a process

ASML NETHERLANDS BV0 citations60

RUAN JUNRU

2 patents
US8111379B2Feb 7, 2012

Automated determination of height and tilt of a substrate surface within a lithography system

RUAN JUNRU1 citations41
US8729492B2May 20, 2014

Methods, devices, and systems for manipulating charged particle streams

RUAN JUNRU0 citations30