Inventor
OKABE SHOTARO
JP31 patents
Patents
31 patentsUS5720826AFeb 24, 1998
Photovoltaic element and fabrication process thereof
CANON KK132 citations98
US5589007ADec 31, 1996
Photovoltaic elements and process and apparatus for their formation
CANON KK112 citations98
US6858308B2Feb 22, 2005
Semiconductor element, and method of forming silicon-based film
CANON KK54 citations96
US5968274AOct 19, 1999
Continuous forming method for functional deposited films and deposition apparatus
CANON KK46 citations96
US7501305B2Mar 10, 2009
Method for forming deposited film and photovoltaic element
CANON KK21 citations93
US5919310AJul 6, 1999
Continuously film-forming apparatus provided with improved gas gate means
CANON KK37 citations93
US7074641B2Jul 11, 2006
Method of forming silicon-based thin film, silicon-based thin film, and photovoltaic element
CANON KK47 citations92
US6794275B2Sep 21, 2004
Process for forming a silicon-based film on a substrate using a temperature gradient across the substrate axis
CANON KK48 citations92
US6399411B1Jun 4, 2002
Method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device
CANON KK35 citations92
US6313430B1Nov 6, 2001
Plasma processing apparatus and plasma processing method
CANON KK26 citations92
US6287943B1Sep 11, 2001
Deposition of semiconductor layer by plasma process
CANON KK28 citations92
US6271055B1Aug 7, 2001
Process for manufacturing semiconductor element using non-monocrystalline semiconductor layers of first and second conductivity types and amorphous and microcrystalline I-type semiconductor layers
CANON KK28 citations92
US6162988ADec 19, 2000
Photovoltaic element
CANON KK18 citations92
US6159763ADec 12, 2000
Method and device for forming semiconductor thin film, and method and device for forming photovoltaic element
CANON KK39 citations92
US6159300ADec 12, 2000
Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device
CANON KK23 citations92
US6153013ANov 28, 2000
Deposited-film-forming apparatus
CANON KK47 citations92
US5927994AJul 27, 1999
Method for manufacturing thin film
CANON KK38 citations92
US5897332AApr 27, 1999
Method for manufacturing photoelectric conversion element
CANON KK20 citations92
US5769963AJun 23, 1998
Photovoltaic device
CANON KK39 citations92
US6495392B2Dec 17, 2002
Process for producing a semiconductor device
CANON KK17 citations84
US4545328AOct 8, 1985
Plasma vapor deposition film forming apparatus
CANON KK23 citations82
US6472296B2Oct 29, 2002
Fabrication of photovoltaic cell by plasma process
CANON KK7 citations74
US6368944B1Apr 9, 2002
Method of manufacturing photovoltaic element and apparatus therefor
CANON KK6 citations74
US5946587AAug 31, 1999
Continuous forming method for functional deposited films
CANON KK12 citations74
US4913928AApr 3, 1990
Microwave plasma chemical vapor deposition apparatus with magnet on waveguide
CANON KK14 citations74
US4539934ASep 10, 1985
Plasma vapor deposition film forming apparatus
CANON KK12 citations74
US6436797B1Aug 20, 2002
Apparatus and method for forming a deposited film on a substrate
CANON KK7 citations71
US6877458B2Apr 12, 2005
Apparatus for forming deposited film
CANON KK2 citations63
US6530341B1Mar 11, 2003
Deposition apparatus for manufacturing thin film
CANON KK3 citations63
US4599971AJul 15, 1986
Vapor deposition film forming apparatus
CANON KK3 citations63
US7211708B2May 1, 2007
Exhaust processing method, plasma processing method and plasma processing apparatus
CANON KK2 citations62