Inventor
NATSUME MITSUO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “NATSUME MITSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SINFONIA TECHNOLOGY CO LTD
6 patentsUS9174253B2Nov 3, 2015
Purge nozzle unit, purge apparatus and load port
SINFONIA TECHNOLOGY CO LTD10 citations83
US9704727B2Jul 11, 2017
Efem
SINFONIA TECHNOLOGY CO LTD10 citations82
US9916997B2Mar 13, 2018
End structure of nozzle, purging device, and load port
SINFONIA TECHNOLOGY CO LTD6 citations70
US9239228B2Jan 19, 2016
Wafer mapping apparatus and load port including same
SINFONIA TECHNOLOGY CO LTD3 citations69
US9412634B2Aug 9, 2016
Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM
SINFONIA TECHNOLOGY CO LTD3 citations68
US9685359B2Jun 20, 2017
Load port device
SINFONIA TECHNOLOGY CO LTD0 citations35